Potassium Permanganate-Based Slurry to Reduce the Galvanic Corrosion of the Cu/Ru/TiN Barrier Liner Stack during CMP in the BEOL Interconnects
Type:
Journal
Info:
ECS J. Solid State Sci. Technol. 2016 volume 5, issue 5, P256-P263
Date:
2016-02-01
Author Information
| Name | Institution |
|---|---|
| K. V. Sagi | Clarkson University |
| H. P. Amanapu | Clarkson University |
| S. R. Alety | Clarkson University |
| S. V. Babu | Clarkson University |
Films
Film/Plasma Properties
Substrates
| Silicon |
| SiO2 |
Notes
| 774 |