Ru Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ru films returned 37 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	A Bilayer Diffusion Barrier of ALD-Ru/ALD-TaCN for Direct Plating of Cu
2	Atomic layer deposited self-forming Ru-Mn diffusion barrier for seedless Cu interconnects
3	Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
4	Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application
5	Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH3 Plasma as a Reactant
6	Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor
7	Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)2 Precursor and Oxygen Gas
8	Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper
9	Correlation of carbon content with the thermal stability of ruthenium deposited by using RF-direct plasma-enhanced atomic-layer deposition
10	Development of Manufacturable Solutions for the Direct Plating of Copper on Robust ALD-Grown Barriers
11	Development of plasma-enhanced atomic layer deposition grown Ru-WCN mixed phase films for nanoscale diffusion barrier and copper direct-plate applications
12	Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition
13	Formation of Ru nanocrystals by plasma enhanced atomic layer deposition for nonvolatile memory applications
14	High-aspect-ratio TSVs with thALD/PEALD tantalum-based barrier layer, thALD Ruthenium seed layer and subsequent copper electroplating
15	Improvement of smooth surface of RuO2 bottom electrode on Al2O3 buffer layer and characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 capacitors
16	Improvement of the thermal stability of nickel silicide using a ruthenium interlayer deposited via remote plasma atomic layer deposition
17	In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
18	In Situ Two-Step Plasma Enhanced Atomic Layer Deposition of Ru/RuNx Barriers for Seedless Copper Electroplating
19	Integration of Atomic Layer Deposition-Grown Copper Seed Layers for Cu Electroplating Applications
20	Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
21	Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO4-precursor and H2-plasma
22	Non-destructive acoustic metrology and void detection in 3x50μm TSV
23	PEALD of a Ruthenium Adhesion Layer for Copper Interconnects
24	Plasma-Enhanced Atomic Layer Deposition of Ru-TiN Thin Films for Copper Diffusion Barrier Metals
25	Plasma-Enhanced Atomic Layer Deposition of Ruthenium Thin Films
26	Potassium Permanganate-Based Slurry to Reduce the Galvanic Corrosion of the Cu/Ru/TiN Barrier Liner Stack during CMP in the BEOL Interconnects
27	Preparation of Ru thin film layer on Si and TaN/Si as diffusion barrier by plasma enhanced atomic layer deposition
28	Radical Enhanced Atomic Layer Deposition of Metals and Oxides
29	Reliability testing of high aspect ratio through silicon vias fabricated with atomic layer deposition barrier, seed layer and direct plating and material properties characterization of electrografted insulator, barrier and seed layer for 3-D integration
30	Ru thin film grown on TaN by plasma enhanced atomic layer deposition
31	Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications
32	Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions
33	Structure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions
34	The Properties of Cu Thin Films on Ru Depending on the ALD Temperature
35	The properties of Ru films deposited by remote plasma atomic layer deposition on Ar plasma-treated SiO2
36	Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
37	Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition

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