Ru Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ru films returned 33 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A Bilayer Diffusion Barrier of ALD-Ru/ALD-TaCN for Direct Plating of Cu
2Atomic layer deposited self-forming Ru-Mn diffusion barrier for seedless Cu interconnects
3Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
4Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH3 Plasma as a Reactant
5Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor
6Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)2 Precursor and Oxygen Gas
7Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper
8Correlation of carbon content with the thermal stability of ruthenium deposited by using RF-direct plasma-enhanced atomic-layer deposition
9Development of plasma-enhanced atomic layer deposition grown Ru-WCN mixed phase films for nanoscale diffusion barrier and copper direct-plate applications
10Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition
11Formation of Ru nanocrystals by plasma enhanced atomic layer deposition for nonvolatile memory applications
12Improvement of smooth surface of RuO2 bottom electrode on Al2O3 buffer layer and characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 capacitors
13Improvement of the thermal stability of nickel silicide using a ruthenium interlayer deposited via remote plasma atomic layer deposition
14In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
15In Situ Two-Step Plasma Enhanced Atomic Layer Deposition of Ru/RuNx Barriers for Seedless Copper Electroplating
16Integration of Atomic Layer Deposition-Grown Copper Seed Layers for Cu Electroplating Applications
17Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
18Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO4-precursor and H2-plasma
19Non-destructive acoustic metrology and void detection in 3x50μm TSV
20PEALD of a Ruthenium Adhesion Layer for Copper Interconnects
21Plasma-Enhanced Atomic Layer Deposition of Ru-TiN Thin Films for Copper Diffusion Barrier Metals
22Potassium Permanganate-Based Slurry to Reduce the Galvanic Corrosion of the Cu/Ru/TiN Barrier Liner Stack during CMP in the BEOL Interconnects
23Preparation of Ru thin film layer on Si and TaN/Si as diffusion barrier by plasma enhanced atomic layer deposition
24Radical Enhanced Atomic Layer Deposition of Metals and Oxides
25Reliability testing of high aspect ratio through silicon vias fabricated with atomic layer deposition barrier, seed layer and direct plating and material properties characterization of electrografted insulator, barrier and seed layer for 3-D integration
26Ru thin film grown on TaN by plasma enhanced atomic layer deposition
27Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications
28Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions
29Structure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions
30The Properties of Cu Thin Films on Ru Depending on the ALD Temperature
31The properties of Ru films deposited by remote plasma atomic layer deposition on Ar plasma-treated SiO2
32Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
33Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition


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