Ru Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ru films returned 49 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy
2Reliability testing of high aspect ratio through silicon vias fabricated with atomic layer deposition barrier, seed layer and direct plating and material properties characterization of electrografted insulator, barrier and seed layer for 3-D integration
3Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions
4Characteristics of Plasma-Enhanced Atomic Layer Deposited RuSiN as a Diffusion Barrier against Cu
5Improvement of the thermal stability of nickel silicide using a ruthenium interlayer deposited via remote plasma atomic layer deposition
6Non-destructive acoustic metrology and void detection in 3x50μm TSV
7Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
8Temperature controlled Ru and RuO2 growth via O* radical-enhanced atomic layer deposition with Ru(EtCp)2
9Development of Manufacturable Solutions for the Direct Plating of Copper on Robust ALD-Grown Barriers
10A Bilayer Diffusion Barrier of ALD-Ru/ALD-TaCN for Direct Plating of Cu
11Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition
12In Situ Two-Step Plasma Enhanced Atomic Layer Deposition of Ru/RuNx Barriers for Seedless Copper Electroplating
13Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications
14Characterization of Ultrathin PEALD-Grown RuCo Films for Diffusion Barrier and Copper Direct-Plate Applications
15Plasma Enhanced Atomic Layer Deposition of Ruthenium Thin Films Using Isopropylmethylbenzene-Cyclohexadiene-Ruthenium and NH3 Plasma
16Properties of plasma enhanced atomic layer deposited ruthenium thin films from Ru(EtCp)2
17Initial Stages of Ruthenium Film Growth in Plasma-Enhanced Atomic Layer Deposition
18Improvement of smooth surface of RuO2 bottom electrode on Al2O3 buffer layer and characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 capacitors
19Formation of Ru nanocrystals by plasma enhanced atomic layer deposition for nonvolatile memory applications
20Atomic layer deposited self-forming Ru-Mn diffusion barrier for seedless Cu interconnects
21The Properties of Cu Thin Films on Ru Depending on the ALD Temperature
22Plasma-Enhanced Atomic Layer Deposition of Ruthenium Thin Films
23Plasma-Enhanced Atomic Layer Deposition of Ru-TiN Thin Films for Copper Diffusion Barrier Metals
24Structure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions
25Radical Enhanced Atomic Layer Deposition of Metals and Oxides
26Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor
27Texture of atomic layer deposited ruthenium
28Plasma Enhanced Atomic Layer Deposition of Ruthenium Films Using Ru(EtCp)2 Precursor
29The properties of Ru films deposited by remote plasma atomic layer deposition on Ar plasma-treated SiO2
30Plasma-enhanced atomic layer deposition of ruthenium metal on free-standing carbon nanotube forest for 3D flexible binder-less supercapacitor electrodes
31Potassium Permanganate-Based Slurry to Reduce the Galvanic Corrosion of the Cu/Ru/TiN Barrier Liner Stack during CMP in the BEOL Interconnects
32Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper
33Development of plasma-enhanced atomic layer deposition grown Ru-WCN mixed phase films for nanoscale diffusion barrier and copper direct-plate applications
34Correlation of carbon content with the thermal stability of ruthenium deposited by using RF-direct plasma-enhanced atomic-layer deposition
35Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH3 Plasma as a Reactant
36High-aspect-ratio TSVs with thALD/PEALD tantalum-based barrier layer, thALD Ruthenium seed layer and subsequent copper electroplating
37Preparation of Ru thin film layer on Si and TaN/Si as diffusion barrier by plasma enhanced atomic layer deposition
38Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
39Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO4-precursor and H2-plasma
40Integration of Atomic Layer Deposition-Grown Copper Seed Layers for Cu Electroplating Applications
41Reactions of ruthenium cyclopentadienyl precursor in the metal precursor pulse of Ru atomic layer deposition
42Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application
43Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition
44In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
45Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
46PEALD of a Ruthenium Adhesion Layer for Copper Interconnects
47Plasma-enhanced atomic layer deposition of Ir thin films for copper adhesion layer
48Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)2 Precursor and Oxygen Gas
49Ru thin film grown on TaN by plasma enhanced atomic layer deposition