Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions

Type:
Journal
Info:
Micron, Volume 74, 2015, Pages 8 - 14
Date:
2015-03-30

Author Information

Name Institution
M. KawasakiJEOL USA Inc.
C.N. HsiaoNational Applied Research Laboratories
Jer-Ren YangNational Taiwan University
Makoto ShiojiriKyoto Institute of Technology

Films

Plasma Ru


Plasma Ru


Plasma Pt


Film/Plasma Properties

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: TEM, Transmission Electron Microscope

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Electron Diffraction

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy

Substrates

Silicon
Amorphous C

Keywords

Nanolaminate
Catalysts
Fuel Cell

Notes

534