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Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions
Type:
Journal
Info:
Micron, Volume 74, 2015, Pages 8 - 14
Date:
2015-03-30
Author Information
| Name | Institution |
|---|---|
| M. Kawasaki | JEOL USA Inc. |
| C.N. Hsiao | National Applied Research Laboratories |
| Jer-Ren Yang | National Taiwan University |
| Makoto Shiojiri | Kyoto Institute of Technology |
Films
Film/Plasma Properties
Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: TEM, Transmission Electron Microscope
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Electron Diffraction
Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Substrates
| Silicon |
| Amorphous C |
Notes
| 534 |