Publication Information

Title: Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions

Type: Journal

Info: Micron, Volume 74, 2015, Pages 8 - 14

Date: 2015-03-30

DOI: http://dx.doi.org/10.1016/j.micron.2015.03.012

Author Information

Name

Institution

JEOL USA Inc.

National Applied Research Laboratories

National Taiwan University

Kyoto Institute of Technology

Films

Plasma Ru using Custom

Deposition Temperature = 300C

1287-13-4

7782-44-7

Plasma Ru using Custom

Deposition Temperature = 300C

32992-96-4

7782-44-7

Plasma Pt using Custom

Deposition Temperature = 300C

94442-22-5

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Resistivity, Sheet Resistance

Four-point Probe

Unknown

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

TEM, Transmission Electron Microscope

Unknown

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

Electron Diffraction

Unknown

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

JEOL JEM ARM 200

Substrates

Silicon

Amorphous C

Keywords

Nanolaminate

Catalysts

Fuel Cell

Notes

534



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