Publication Information

Title: Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions

Type: Journal

Info: Micron, Volume 74, 2015, Pages 8 - 14

Date: 2015-03-30

DOI: http://dx.doi.org/10.1016/j.micron.2015.03.012

Author Information

Name

Institution

JEOL USA Inc.

National Applied Research Laboratories

National Taiwan University

Kyoto Institute of Technology

Films

Plasma Ru using Custom

Deposition Temperature = 300C

1287-13-4

7782-44-7

Plasma Ru using Custom

Deposition Temperature = 300C

32992-96-4

7782-44-7

Plasma Pt using Custom

Deposition Temperature = 300C

94442-22-5

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Resistivity, Sheet Resistance

Four-point Probe

-

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

TEM, Transmission Electron Microscope

-

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

Electron Diffraction

-

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

JEOL JEM ARM 200

Substrates

Silicon

Amorphous C

Keywords

Nanolaminate

Catalysts

Fuel Cell

Notes

534



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