M. Kawasaki Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by M. Kawasaki returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions|
|2||Structure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions|