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Pt Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Pt films returned 35 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Energy transformation of plasmonic photocatalytic oxidation on 1D quantum well of platinum thin film
2Metallic nanoparticle-based strain sensors elaborated by atomic layer deposition
3Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates
4Synthesis of Pt@TiO2@CNTs Hierarchical Structure Catalyst by Atomic Layer Deposition and Their Photocatalytic and Photoelectrochemical Activity
5Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
6Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
7Structure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions
8Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
9Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions
10Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops
11Room-Temperature Atomic Layer Deposition of Platinum
12In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
13Platinum thin films with good thermal and chemical stability fabricated by inductively coupled plasma-enhanced atomic layer deposition at low temperatures
14Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
15Encapsulation method for atom probe tomography analysis of nanoparticles
16Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
17Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
18Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition
19Plasma enhanced atomic layer deposited platinum thin film on Si substrate with TMA pretreatment
20Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum
21The size effect of titania-supported Pt nanoparticles on the electrocatalytic activity towards methanol oxidation reaction primarily via the bifunctional mechanism
22Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition
23Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
24Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing
25Supportless Platinum Nanotubes Array by Atomic Layer Deposition as PEM Fuel Cell Electrode
26Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support
27Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers
28Remote Plasma ALD of Platinum and Platinum Oxide Films
29Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
30Atomic Layer Deposition of Cobalt Phosphide for Efficient Water Splitting
31Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
32Enhanced Methanol Oxidation with Annealed Atomic Layer Deposited Platinum Nanoparticles on Carbon Nanotubes
33Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy
34Growth of silica nanowires in vacuum
35Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation