Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition
Type:
Journal
Info:
Nanotechnology 26 (2015) 094002
Date:
2015-01-15
Author Information
| Name | Institution |
|---|---|
| Matthieu J. Weber | Eindhoven University of Technology |
| Marcel A. Verheijen | Eindhoven University of Technology |
| Ageeth A. Bol | Eindhoven University of Technology |
| Erwin (W.M.M.) Kessels | Eindhoven University of Technology |
Films
Film/Plasma Properties
Substrates
Notes
| 536 |