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Publication Information

Title: Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition

Type: Journal

Info: Nanotechnology 26 (2015) 094002

Date: 2015-01-15

DOI: http://stacks.iop.org/0957-4484/26/i=9/a=094002

Author Information

Name

Institution

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Films

Plasma Pt using Custom

Deposition Temperature = 100C

94442-22-5

7782-44-7

Plasma Pd using Custom

Deposition Temperature = 100C

64916-48-9

7782-44-7

1333-74-0

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Notes

536


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