Publication Information

Title:
Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition
Type:
Journal
Info:
Nanotechnology 26 (2015) 094002
Date:
2015-01-15

Author Information

Name Institution
Matthieu J. WeberEindhoven University of Technology
Marcel A. VerheijenEindhoven University of Technology
Ageeth A. BolEindhoven University of Technology
Erwin (W.M.M.) KesselsEindhoven University of Technology

Films

Plasma Pt


Plasma Pd


Film/Plasma Properties

Substrates

Keywords

Notes

536