Pd Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Pd films returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
2	Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
3	In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
4	Plasma-enhanced atomic layer deposition of palladium on a polymer substrate
5	Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition

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