Your search for plasma enhanced atomic layer deposition publications discussing Pd films returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas|
|2||Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation|
|3||In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd|
|4||Plasma-Assisted Atomic Layer Deposition of Palladium|
|5||Plasma-enhanced atomic layer deposition of palladium on a polymer substrate|
|6||Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition|
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