Pd Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Pd films returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-enhanced atomic layer deposition of palladium on a polymer substrate
2Tuning size and coverage of Pd nanoparticles using atomic layer deposition
3Plasma-Assisted Atomic Layer Deposition of Palladium
4Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
5Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
6Direct Plating of Cu on Pd Plasma Enhanced Atomic Layer Deposition Coated TaN Barrier
7In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
8Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition