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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
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Pd Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Pd films returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-Assisted Atomic Layer Deposition of Palladium
2Plasma-enhanced atomic layer deposition of palladium on a polymer substrate
3Tuning size and coverage of Pd nanoparticles using atomic layer deposition
4Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
5In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
6Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
7Direct Plating of Cu on Pd Plasma Enhanced Atomic Layer Deposition Coated TaN Barrier
8Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition