Pd Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Pd films returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-Assisted Atomic Layer Deposition of Palladium
2Direct Plating of Cu on Pd Plasma Enhanced Atomic Layer Deposition Coated TaN Barrier
3In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
4Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
5Tuning size and coverage of Pd nanoparticles using atomic layer deposition
6Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
7Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition
8Plasma-enhanced atomic layer deposition of palladium on a polymer substrate