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Tuning size and coverage of Pd nanoparticles using atomic layer deposition
Type:
Journal
Info:
Applied Surface Science 539 (2021) 148238
Date:
2020-10-20
Author Information
| Name | Institution |
|---|---|
| Ji-Yu Feng | Ghent University |
| Ranjith K. Ramachandran | Ghent University |
| Eduardo Solano | Ghent University |
| Matthias M. Minjauw | Ghent University |
| Michiel Van Daele | Ghent University |
| André Vantomme | KU Leuven |
| Daniel Hermida-Merino | European Synchrotron Radiation Facility (ESRF) |
| Alessandro Coati | Synchrotron SOLEIL |
| Hilde Poelman | Ghent University |
| Christophe Detavernier | Ghent University |
| Jolien Dendooven | Ghent University |
Films
Plasma Pd
Plasma Pd
Plasma Pd
Film/Plasma Properties
Characteristic: Particle Size Distribution
Analysis: XRF, X-Ray Fluorescence
Characteristic: Particle Surface Density
Analysis: XRF, X-Ray Fluorescence
Characteristic: Particle Size Distribution
Analysis: GISAXS, Grazing Incidence Small Angle X-ray Scattering
Characteristic: Particle Surface Density
Analysis: GISAXS, Grazing Incidence Small Angle X-ray Scattering
Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Particle Surface Density
Analysis: XRF, X-Ray Fluorescence
Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Substrates
| SiO2 |
| Al2O3 |
Notes
| 1604 |