Inductively coupled plasma sources from Plasma ALD, LLC.


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Ji-Yu Feng Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ji-Yu Feng returned 3 record(s).

NumberTitle
1Shuffling Atomic Layer Deposition Gas Sequences to Modulate Bimetallic Thin Films and Nanoparticle Properties
2Tuning size and coverage of Pd nanoparticles using atomic layer deposition
3Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature