Ji-Yu Feng Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ji-Yu Feng returned 3 record(s).

Number	Title
1	Shuffling Atomic Layer Deposition Gas Sequences to Modulate Bimetallic Thin Films and Nanoparticle Properties
2	Tuning size and coverage of Pd nanoparticles using atomic layer deposition
3	Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature