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Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature

Type:
Journal
Info:
ACS Appl. Mater. Interfaces, 2019, 11 (40), pp 37229-37238
Date:
2019-09-16
DOI:
http://dx.doi.org/10.1021/acsami.9b10848

Author Information

Name Institution
Michiel Van DaeleGhent University
Matthew B. E. GriffithsGhent University
Ali RazaGhent University
Matthias M. MinjauwGhent University
Eduardo SolanoALBA Synchrotron Light Source, NCD-SWEET Beamline
Ji-Yu FengGhent University
Ranjith K. RamachandranGhent University
Stephane ClemmenGhent University
Roel BaetsGhent University
Sean T. BarryCarleton University
Christophe DetavernierGhent University
Jolien DendoovenGhent University

Films

Plasma Au

Hardware used: Custom Remote Inductively Coupled Plasma
Trimethylphosphino Trimethyl Gold(III), Trimethyl Trimethylphosphine Gold(III)
CAS#: 33012-33-8
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature Range = 50-140C

Film/Plasma Properties

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: Bruker D8 Discover

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker D8 Discover

Characteristic: Thickness
Analysis: XRF, X-Ray Fluorescence
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo VG-Scientific theta probe

Characteristic: Chemical Binding
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo VG-Scientific theta probe

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Quanta 200 FEG

Characteristic: Conformality, Step Coverage
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Quanta 200 FEG

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: FEI Quanta 200 FEG

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Diagnostic: -

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: Bruker Dimension Edge

Characteristic: Morphology, Roughness, Topography
Analysis: GISAXS, Grazing Incidence Small Angle X-ray Scattering
Diagnostic: Synchrotron

Characteristic: Surface Enhancement
Analysis: SERS, Surface Enhanced Raman Scattering
Diagnostic: Alpha 300R Confocal Raman Microscope

Characteristic: Raman Spectra
Analysis: Raman Spectroscopy
Diagnostic: Alpha 300R Confocal Raman Microscope

Substrates

Si(100)
SiO2
Au

Notes

1683