Christophe Detavernier Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Christophe Detavernier returned 40 record(s).

Number	Title
1	Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy
2	Tuning size and coverage of Pd nanoparticles using atomic layer deposition
3	Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO₄-precursor and H₂-plasma
4	Plasma enhanced atomic layer deposition of Ga₂O₃ thin films
5	Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
6	Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
7	Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
8	Manganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing
9	Ru thin film grown on TaN by plasma enhanced atomic layer deposition
10	Deposition Of MnO Anode And MnO₂ Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)₃ Precursor
11	Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH₃ on Particles Agitated in a Rotary Reactor
12	Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
13	Diffusion barrier properties of TaN_x films prepared by plasma enhanced atomic layer deposition from PDMAT with N₂ or NH₃ plasma
14	Texture of atomic layer deposited ruthenium
15	Plasma-enhanced atomic layer deposition of zinc phosphate
16	Growth Kinetics and Crystallization Behavior of TiO₂ Films Prepared by Plasma Enhanced Atomic Layer Deposition
17	Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
18	Plasma-enhanced atomic layer deposition: Correlating O₂ plasma parameters and species to blister formation and conformal film growth
19	Robust TaN_x diffusion barrier for Cu-interconnect technology with subnanometer thickness by metal-organic plasma-enhanced atomic layer deposition
20	Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions
21	Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
22	Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
23	Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
24	Plasma enhanced atomic layer deposition of gallium sulfide thin films
25	A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
26	Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
27	Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe₂O₃-SnO₂
28	Controllable nitrogen doping in as deposited TiO₂ film and its effect on post deposition annealing
29	Low Temperature Atomic Layer Deposition of Crystalline In₂O₃ Films
30	Plasma enhanced atomic layer deposition of aluminum sulfide thin films
31	TaCN growth with PDMAT and H₂/Ar plasma by plasma enhanced atomic layer deposition
32	Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper
33	Atomic layer deposition of titanium nitride from TDMAT precursor
34	Shuffling Atomic Layer Deposition Gas Sequences to Modulate Bimetallic Thin Films and Nanoparticle Properties
35	Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
36	Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature
37	A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films
38	Plasma enhanced atomic layer deposition of zinc sulfide thin films
39	Conformality of Al₂O₃ and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
40	Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films

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Christophe Detavernier Plasma Enhanced Atomic Layer Deposition Film Publications