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A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects

Type:
Journal
Info:
Surface and Coatings Technology Volume 213, December 2012, Pages 183-191
Date:
2012-10-19
DOI:
http://dx.doi.org/10.1016/j.surfcoat.2012.10.045

Author Information

Name Institution
Delphine LongrieGhent University
Davy DeduytscheGhent University
Jo HaemersGhent University
Kris DriesenUmicore
Christophe DetavernierGhent University

Films

Thermal Al2O3

Hardware used: Custom Rotary
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
H2O, Water
CAS#: 7732-18-5
Deposition Temperature = 200C

Plasma Al2O3

Hardware used: Custom Rotary
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 200C

Thermal TiO2

Hardware used: Custom Rotary
TDMATi, tetrakis(dimethylamido)titanium, titanium dimethylamide, (Me2N)4Ti
CAS#: 3275-24-9
H2O, Water
CAS#: 7732-18-5
Deposition Temperature = 150C

Thermal AlN

Hardware used: Custom Rotary
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
NH3, Ammonia
CAS#: 7664-41-7
Deposition Temperature = 100C

Plasma AlN

Hardware used: Custom Rotary
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
NH3, Ammonia
CAS#: 7664-41-7
Deposition Temperature = 100C

Film/Plasma Properties

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: -

Characteristic: Precursor Utilization
Analysis: QMS, Quadrupole Mass Spectrometer
Diagnostic: Hiden Analytical QMS

Characteristic: OES
Analysis: OES, Optical Emission Spectroscopy
Diagnostic: Ocean Optics QE65000 Spectrometer

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Surface Science Instruments

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: FEI Quanta 200 FEG

Characteristic: Conformality, Step Coverage
Analysis: TEM, Transmission Electron Microscope
Diagnostic: FEI Tecnai G2 F30

Characteristic: Conformality, Step Coverage
Analysis: XRF, X-Ray Fluorescence
Diagnostic: Bruker Artax

Substrates

ZnO
Stainless Steel
Ti
Glass

Notes

Custom rotary PEALD system demonstrated with variety of films on different particles.
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