Custom Rotary Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom Rotary hardware returned 4 records.

Number	Title
1	A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
2	Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH₃ on Particles Agitated in a Rotary Reactor
3	Plasma Enhanced Atomic Layer Deposition on Powders
4	Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates