Davy Deduytsche Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Davy Deduytsche returned 15 record(s).

Number	Title
1	Texture of atomic layer deposited ruthenium
2	Conformality of Al₂O₃ and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
3	TaCN growth with PDMAT and H₂/Ar plasma by plasma enhanced atomic layer deposition
4	Ru thin film grown on TaN by plasma enhanced atomic layer deposition
5	Controllable nitrogen doping in as deposited TiO₂ film and its effect on post deposition annealing
6	Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH₃ on Particles Agitated in a Rotary Reactor
7	Atomic layer deposition of titanium nitride from TDMAT precursor
8	A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
9	Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
10	Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions
11	Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
12	Growth Kinetics and Crystallization Behavior of TiO₂ Films Prepared by Plasma Enhanced Atomic Layer Deposition
13	Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
14	Diffusion barrier properties of TaN_x films prepared by plasma enhanced atomic layer deposition from PDMAT with N₂ or NH₃ plasma
15	Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality