Davy Deduytsche Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Davy Deduytsche returned 15 record(s).

Number	Title
1	A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
2	Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions
3	Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
4	Controllable nitrogen doping in as deposited TiO₂ film and its effect on post deposition annealing
5	Texture of atomic layer deposited ruthenium
6	TaCN growth with PDMAT and H₂/Ar plasma by plasma enhanced atomic layer deposition
7	Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
8	Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH₃ on Particles Agitated in a Rotary Reactor
9	Ru thin film grown on TaN by plasma enhanced atomic layer deposition
10	Growth Kinetics and Crystallization Behavior of TiO₂ Films Prepared by Plasma Enhanced Atomic Layer Deposition
11	Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
12	Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
13	Diffusion barrier properties of TaN_x films prepared by plasma enhanced atomic layer deposition from PDMAT with N₂ or NH₃ plasma
14	Atomic layer deposition of titanium nitride from TDMAT precursor
15	Conformality of Al₂O₃ and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition