Jo Haemers Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jo Haemers returned 4 record(s).

Number	Title
1	Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
2	A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
3	Texture of atomic layer deposited ruthenium
4	Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH₃ on Particles Agitated in a Rotary Reactor