Jo Haemers Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jo Haemers returned 4 record(s).

Number	Title
1	A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
2	Texture of atomic layer deposited ruthenium
3	Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor
4	Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide