Delphine Longrie Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Delphine Longrie returned 3 record(s).

Number	Title
1	A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
2	Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH₃ on Particles Agitated in a Rotary Reactor
3	Texture of atomic layer deposited ruthenium