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Tuning size and coverage of Pd nanoparticles using atomic layer deposition

Type:
Journal
Info:
Applied Surface Science 539 (2021) 148238
Date:
2020-10-20
DOI:
https://doi.org/10.1016/j.apsusc.2020.148238

Author Information

Name Institution
Ji-Yu FengGhent University
Ranjith K. RamachandranGhent University
Eduardo SolanoGhent University
Matthias M. MinjauwGhent University
Michiel Van DaeleGhent University
André VantommeKU Leuven
Daniel Hermida-MerinoEuropean Synchrotron Radiation Facility (ESRF)
Alessandro CoatiSynchrotron SOLEIL
Hilde PoelmanGhent University
Christophe DetavernierGhent University
Jolien DendoovenGhent University

Films

Plasma Pd

Hardware used: Custom Remote Inductively Coupled Plasma
palladium(II) hexafluoroacetylacetonate, Pd(hfac)2
CAS#: 64916-48-9
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature = 150C

Plasma Pd

Hardware used: Custom Remote Inductively Coupled Plasma
palladium(II) hexafluoroacetylacetonate, Pd(hfac)2
CAS#: 64916-48-9
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature = 150C

Plasma Pd

Hardware used: Custom Remote Inductively Coupled Plasma
palladium(II) hexafluoroacetylacetonate, Pd(hfac)2
CAS#: 64916-48-9
H2, Hydrogen
CAS#: 1333-74-0
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 150C

Film/Plasma Properties

Characteristic: Particle Size Distribution
Analysis: XRF, X-Ray Fluorescence
Diagnostic: Synchrotron

Characteristic: Particle Surface Density
Analysis: XRF, X-Ray Fluorescence
Diagnostic: Synchrotron

Characteristic: Particle Size Distribution
Analysis: GISAXS, Grazing Incidence Small Angle X-ray Scattering
Diagnostic: Synchrotron

Characteristic: Particle Surface Density
Analysis: GISAXS, Grazing Incidence Small Angle X-ray Scattering
Diagnostic: Synchrotron

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Sirion-100

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo VG-Scientific theta probe

Characteristic: Particle Surface Density
Analysis: XRF, X-Ray Fluorescence
Diagnostic: Bruker Artax

Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Diagnostic: -

Substrates

SiO2
Al2O3

Notes

1604