Inductively coupled plasma sources from Plasma ALD, LLC.


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Alessandro Coati Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alessandro Coati returned 3 record(s).

NumberTitle
1Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
2Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
3Tuning size and coverage of Pd nanoparticles using atomic layer deposition