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Jolien Dendooven Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jolien Dendooven returned 20 record(s).

NumberTitle
1Plasma enhanced atomic layer deposition of Ga2O3 thin films
2Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
3A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films
4Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
5Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy
6Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
7Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
8On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies
9Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
10Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
11Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO4-precursor and H2-plasma
12Shuffling Atomic Layer Deposition Gas Sequences to Modulate Bimetallic Thin Films and Nanoparticle Properties
13Plasma-enhanced atomic layer deposition: Correlating O2 plasma parameters and species to blister formation and conformal film growth
14Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature
15Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
16Manganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing
17Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
18Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
19Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
20Tuning size and coverage of Pd nanoparticles using atomic layer deposition