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Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries

Type:
Journal
Info:
Chem. Mater. 2016, 28, 3435-3445
Date:
2016-04-27
DOI:
http://dx.doi.org/10.1021/acs.chemmater.6b00853

Author Information

Name Institution
Thomas DobbelaereGhent University
Felix MattelaerGhent University
Jolien DendoovenGhent University
Philippe M VereeckenGhent University
Christophe DetavernierGhent University

Films

Plasma FePO4

Hardware used: Custom Remote Inductively Coupled Plasma
t-Butylferrocene, (TBF), (t-BuCp)2Fe
CAS#: 1316-98-9
Trimethyl phosphate, TMP, (MeO)3PO
CAS#: 512-56-1
Deposition Temperature Range = 150-350C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Refractive Index
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Extinction Coefficient
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker D8 Discover

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker D8 Discover

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: Bruker D8 Discover

Characteristic: Conformality, Step Coverage
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Quanta 200 FEG

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: FEI Quanta 200 FEG

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo VG-Scientific theta probe

Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis
Diagnostic: -

Characteristic: Electrochemical Performance
Analysis: CV, Cyclic Voltammetry
Diagnostic: -

Characteristic: Charge Capacity
Analysis: Custom
Diagnostic: Custom

Substrates

Si(100)
Micropillar Arrays
Pt

Notes

Available as chapter 5 in on-line thesis: Plasma-enhanced atomic layer deposition of transition metal phosphates
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