Felix Mattelaer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Felix Mattelaer returned 9 record(s).

Number	Title
1	Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
2	Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
3	Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
4	A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films
5	Manganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing
6	Deposition Of MnO Anode And MnO₂ Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)₃ Precursor
7	Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe₂O₃-SnO₂
8	Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
9	Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films