About Plasma ALD, LLC

The Plasma Enhanced Atomic Layer Deposition Publication Database is developed and maintained by Plasma ALD, LLC, a developer and supplier of inductively coupled plasma (ICP) sources for plasma-enhanced atomic layer deposition (PEALD), atomic layer etch (ALE), thin-film etching, surface cleaning, surface modification, and research plasma systems.

Our ICP sources are designed for integration with existing ALD and vacuum-processing equipment. Plasma ALD also provides plasma-source integration, process-development, and troubleshooting assistance based on decades of experience with low-pressure plasma processing and PEALD systems.

Researchers, universities, equipment manufacturers, and laboratories looking for an ICP plasma source or assistance adding plasma capability to a vacuum system can learn more on our Plasma Sources page.

Trimethyl phosphate, TMP, (MeO)3PO , CAS# 512-56-1

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 19 record(s).

NumberTitle
1Plasma-enhanced atomic layer deposition of zinc phosphate
2Atomic Layer Deposition of Aluminum Phosphate Using AlMe3, PO(OMe)3, and O2 Plasma: Film Growth and Surface Reactions
3Atomic Layer Deposition of the Solid Electrolyte LiPON
4Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
5Effective Surface Passivation of InP Nanowires by Atomic-Layer-Deposited Al2O3 with POx Interlayer
6Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes
7Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
8Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
9Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
10Atomic Layer Deposition of Aluminum Phosphate Using AlMe3, PO(OMe)3, and O2 Plasma: Film Growth and Surface Reactions
11Low temperature plasma-enhanced atomic layer deposition of sodium phosphorus oxynitride with tunable nitrogen content
12Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
13Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
14Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
15Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma
16Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
17Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction
18Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
19Stabilization of Lithium Metal Anodes by Hybrid Artificial Solid Electrolyte Interphase