Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Trimethyl phosphate, TMP, (MeO)3PO , CAS# 512-56-1

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 19 record(s).

NumberTitle
1Effective Surface Passivation of InP Nanowires by Atomic-Layer-Deposited Al2O3 with POx Interlayer
2Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
3Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
4Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes
5Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
6Stabilization of Lithium Metal Anodes by Hybrid Artificial Solid Electrolyte Interphase
7Atomic Layer Deposition of the Solid Electrolyte LiPON
8Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
9Low temperature plasma-enhanced atomic layer deposition of sodium phosphorus oxynitride with tunable nitrogen content
10Atomic Layer Deposition of Aluminum Phosphate Using AlMe3, PO(OMe)3, and O2 Plasma: Film Growth and Surface Reactions
11Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
12Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
13Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma
14Atomic Layer Deposition of Aluminum Phosphate Using AlMe3, PO(OMe)3, and O2 Plasma: Film Growth and Surface Reactions
15Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
16Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
17Plasma-enhanced atomic layer deposition of zinc phosphate
18Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
19Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction