Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Trimethyl phosphate, TMP, (MeO)3PO , CAS# 512-56-1

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 19 record(s).

NumberTitle
1Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
2Atomic Layer Deposition of Aluminum Phosphate Using AlMe3, PO(OMe)3, and O2 Plasma: Film Growth and Surface Reactions
3Plasma-enhanced atomic layer deposition of zinc phosphate
4Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
5Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
6Stabilization of Lithium Metal Anodes by Hybrid Artificial Solid Electrolyte Interphase
7Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes
8Low temperature plasma-enhanced atomic layer deposition of sodium phosphorus oxynitride with tunable nitrogen content
9Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
10Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
11Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma
12Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
13Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction
14Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
15Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
16Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
17Atomic Layer Deposition of Aluminum Phosphate Using AlMe3, PO(OMe)3, and O2 Plasma: Film Growth and Surface Reactions
18Effective Surface Passivation of InP Nanowires by Atomic-Layer-Deposited Al2O3 with POx Interlayer
19Atomic Layer Deposition of the Solid Electrolyte LiPON