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Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes

Type:
Journal
Info:
ACS Nano, 10, 2016, (2), pp 2693-2701
Date:
2016-01-28
DOI:
http://dx.doi.org/10.1021/acsnano.5b07757

Author Information

Name Institution
Chuan-Fu LinUniversity of Maryland
Malachi NokedUniversity of Maryland
Alexander Campbell KozenUniversity of Maryland
Chanyuan LiuUniversity of Maryland
Oliver ZhaoUniversity of Maryland
Keith E. GregorczykUniversity of Maryland
Liangbing HuUniversity of Maryland
Sang Bok LeeUniversity of Maryland
Gary W. RubloffUniversity of Maryland

Films

Other LiPON

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
LiOt-Bu, LiOtBu, LTB, Lithium tert-butoxide, Lithium tertiary butoxide, LiOC4H9
CAS#: 1907-33-1
H2O, Water
CAS#: 7732-18-5
Trimethyl phosphate, TMP, (MeO)3PO
CAS#: 512-56-1
N2, Nitrogen
CAS#: 7727-37-9
Deposition Temperature = 250C

Thermal RuO2

Hardware used: Custom
Bis(EthylCycloPentadienyl)Ruthenium, Ru(EtCp)2
CAS#: 32992-96-4
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: JEOL 2100

Characteristic: Raman Spectra
Analysis: Raman Spectroscopy
Diagnostic: Horiba Jobin Yvon LabRAM HR800 Raman Spectroscope

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: Bruker D8 Advance

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Kratos Analytical Axis Ultra DLD

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Diagnostic: -

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: -

Substrates

Quartz
RuO2
CNTs, Carbon NanoTubes

Notes

800