LiPON Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing LiPON films returned 4 record(s).

Number	Title
1	Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes
2	Atomic Layer Deposition of the Solid Electrolyte LiPON
3	Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
4	Stabilization of Lithium Metal Anodes by Hybrid Artificial Solid Electrolyte Interphase