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RuO2 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing RuO2 films returned 13 record(s).

NumberTitle
1Radical Enhanced Atomic Layer Deposition of Metals and Oxides
2Enhanced Dielectric Properties of SrTiO3 Films with a SrRuO3 Seed by Plasma-Enhanced Atomic Layer Deposition
3Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor
4Ru Thin Film Formation Using Oxygen Plasma Enhanced ALD and Rapid Thermal Processing
5ALD ruthenium oxide-carbon nanotube electrodes for supercapacitor applications
6Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes
7Improvement of smooth surface of RuO2 bottom electrode on Al2O3 buffer layer and characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 capacitors
8(Invited) Characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 Capacitors
9Properties of plasma enhanced atomic layer deposited ruthenium thin films from Ru(EtCp)2
10Atomic layer deposition of RuO2 thin films on SiO2 using Ru(EtCp)2 and O2 plasma
11Effect of annealing conditions on formation of SrRuO3 films by interfacial reaction of SrO/RuO2 bi-layer films
12Plasma Enhanced Atomic Layer Deposition of Ruthenium Films Using Ru(EtCp)2 Precursor
13Temperature controlled Ru and RuO2 growth via O* radical-enhanced atomic layer deposition with Ru(EtCp)2