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Temperature controlled Ru and RuO2 growth via O* radical-enhanced atomic layer deposition with Ru(EtCp)2

Type:
Journal
Info:
The Journal of Chemical Physics 151, 204701 (2019)
Date:
2019-11-03
DOI:
http://dx.doi.org/10.1063/1.5107509

Author Information

Name Institution
M. G. KozodaevMoscow Institute of Physics and Technology
Yuri Yu. LebedinskiiMoscow Institute of Physics and Technology
A. G. ChernikovaMoscow Institute of Physics and Technology
E. V. KorostylevMoscow Institute of Physics and Technology
A. ChouprikMoscow Institute of Physics and Technology
R. R. KhakimovMoscow Institute of Physics and Technology
Andrey M. MarkeevMoscow Institute of Physics and Technology
Cheol Seong HwangSeoul National University

Films

Plasma Ru

Hardware used: Picosun R200
Bis(EthylCycloPentadienyl)Ruthenium, Ru(EtCp)2
CAS#: 32992-96-4
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 200-340C

Plasma RuO2

Hardware used: Picosun R200
Bis(EthylCycloPentadienyl)Ruthenium, Ru(EtCp)2
CAS#: 32992-96-4
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 200-340C

Film/Plasma Properties

Characteristic: Chemical Binding
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo VG-Scientific theta probe

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo VG-Scientific theta probe

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Thermo Fisher ARL X'TRA

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction
Diagnostic: Thermo Fisher ARL X'TRA

Characteristic: Thickness
Analysis: Profilometry
Diagnostic: -

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: JEOL JSM-7001F

Characteristic: Conformality, Step Coverage
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: JEOL JSM-7001F

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: NT-MDT NTEGRA Spectra

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Diagnostic: Jandel

Substrates

Ta2O5

Notes

1541