A. Chouprik Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by A. Chouprik returned 3 record(s).

Number	Title
1	Temperature controlled Ru and RuO₂ growth via O* radical-enhanced atomic layer deposition with Ru(EtCp)₂
2	Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy
3	Electron Transport Across Ultrathin Ferroelectric Hf_0.5Zr_0.5O₂ Films on Si