Andrey M. Markeev Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Andrey M. Markeev returned 6 record(s).

Number	Title
1	In Situ Control of Oxygen Vacancies in TaO_x Thin Films via Plasma-Enhanced Atomic Layer Deposition for Resistive Switching Memory Applications
2	Electron Transport Across Ultrathin Ferroelectric Hf_0.5Zr_0.5O₂ Films on Si
3	Hydrogen radical enhanced atomic layer deposition of TaO_x: saturation studies and methods for oxygen deficiency control
4	Temperature controlled Ru and RuO₂ growth via O* radical-enhanced atomic layer deposition with Ru(EtCp)₂
5	Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy
6	Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO₂/TiN stacks