Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Bis(EthylCycloPentadienyl)Ruthenium, Ru(EtCp)2, CAS# 32992-96-4

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 42 record(s).

NumberTitle
1Plasma-enhanced atomic layer deposition of Ir thin films for copper adhesion layer
2Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition
3Effect of annealing conditions on formation of SrRuO3 films by interfacial reaction of SrO/RuO2 bi-layer films
4Correlation of carbon content with the thermal stability of ruthenium deposited by using RF-direct plasma-enhanced atomic-layer deposition
5Properties of plasma enhanced atomic layer deposited ruthenium thin films from Ru(EtCp)2
6Improvement of Copper Diffusion Barrier Properties of Tantalum Nitride Films by Incorporating Ruthenium Using PEALD
7Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes
8Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy
9Preparation of Ru thin film layer on Si and TaN/Si as diffusion barrier by plasma enhanced atomic layer deposition
10Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application
11Properties of plasma enhanced atomic layer deposited ruthenium thin films from Ru(EtCp)2
12Comparison of PVD, PECVD & PEALD Ru(-C) films as Cu diffusion barriers by means of bias temperature stress measurements
13Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
14Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions
15Improvement of smooth surface of RuO2 bottom electrode on Al2O3 buffer layer and characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 capacitors
16ALD ruthenium oxide-carbon nanotube electrodes for supercapacitor applications
17The properties of Ru films deposited by remote plasma atomic layer deposition on Ar plasma-treated SiO2
18A Bilayer Diffusion Barrier of ALD-Ru/ALD-TaCN for Direct Plating of Cu
19Initial Stages of Ruthenium Film Growth in Plasma-Enhanced Atomic Layer Deposition
20Ru Thin Film Formation Using Oxygen Plasma Enhanced ALD and Rapid Thermal Processing
21Plasma-Enhanced Atomic Layer Deposition of Ru-TiN Thin Films for Copper Diffusion Barrier Metals
22Improvement of the thermal stability of nickel silicide using a ruthenium interlayer deposited via remote plasma atomic layer deposition
23Improvement of smooth surface of RuO2 bottom electrode on Al2O3 buffer layer and characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 capacitors
24Temperature controlled Ru and RuO2 growth via O* radical-enhanced atomic layer deposition with Ru(EtCp)2
25Atomic layer deposition of RuO2 thin films on SiO2 using Ru(EtCp)2 and O2 plasma
26Plasma Enhanced Atomic Layer Deposition of Ruthenium Films Using Ru(EtCp)2 Precursor
27In Situ Two-Step Plasma Enhanced Atomic Layer Deposition of Ru/RuNx Barriers for Seedless Copper Electroplating
28Temperature controlled Ru and RuO2 growth via O* radical-enhanced atomic layer deposition with Ru(EtCp)2
29Reliability testing of high aspect ratio through silicon vias fabricated with atomic layer deposition barrier, seed layer and direct plating and material properties characterization of electrografted insulator, barrier and seed layer for 3-D integration
30PEALD of a Ruthenium Adhesion Layer for Copper Interconnects
31Plasma Enhanced Atomic Layer Deposition of Ruthenium Films Using Ru(EtCp)2 Precursor
32In Situ Two-Step Plasma Enhanced Atomic Layer Deposition of Ru/RuNx Barriers for Seedless Copper Electroplating
33(Invited) Characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 Capacitors
34Formation of Ru nanocrystals by plasma enhanced atomic layer deposition for nonvolatile memory applications
35Improved Oxygen Diffusion Barrier Properties of Ruthenium-Titanium Nitride Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
36Ru thin film grown on TaN by plasma enhanced atomic layer deposition
37Plasma-Enhanced Atomic Layer Deposition of Ru-TiN Thin Films for Copper Diffusion Barrier Metals
38Structure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions
39Texture of atomic layer deposited ruthenium
40Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)2 Precursor and Oxygen Gas
41Enhanced Dielectric Properties of SrTiO3 Films with a SrRuO3 Seed by Plasma-Enhanced Atomic Layer Deposition
42Plasma-Enhanced Atomic Layer Deposition of Ruthenium Thin Films