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A. G. Chernikova Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by A. G. Chernikova returned 3 record(s).

NumberTitle
1Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks
2Electron Transport Across Ultrathin Ferroelectric Hf0.5Zr0.5O2 Films on Si
3Temperature controlled Ru and RuO2 growth via O* radical-enhanced atomic layer deposition with Ru(EtCp)2