M. G. Kozodaev Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by M. G. Kozodaev returned 2 record(s).
| Number | Title |
|---|---|
| 1 | Temperature controlled Ru and RuO2 growth via O* radical-enhanced atomic layer deposition with Ru(EtCp)2 |
| 2 | Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks |