Inductively coupled plasma sources from Plasma ALD, LLC.


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Oliver Zhao Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Oliver Zhao returned 3 record(s).

NumberTitle
1Ultrathin Surface Coating Enables the Stable Sodium Metal Anode
2Stabilization of Lithium Metal Anodes by Hybrid Artificial Solid Electrolyte Interphase
3Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes