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Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction

Type:
Journal
Info:
Electrochemistry Communications 98 (2019) 73-77
Date:
2018-11-29
DOI:
https://doi.org/10.1016/j.elecom.2018.11.021

Author Information

Name Institution
Valerio Di PalmaEindhoven University of Technology
Georgios ZafeiropoulosDutch Institute For Fundamental Energy Research (DIFFER)
T. GoldsweerEindhoven University of Technology
Erwin (W.M.M.) KesselsEindhoven University of Technology
Mauritius C. M. (Richard) van de SandenEindhoven University of Technology
Mariadriana CreatoreEindhoven University of Technology
Mihalis N. TsampasDutch Institute For Fundamental Energy Research (DIFFER)

Films

Plasma Co3(PO4)2

Hardware used: Custom Remote Inductively Coupled Plasma
cobaltacene, bis(cyclopentadienyl)cobalt, Cp2Co
CAS#: 1277-43-6
Trimethyl phosphate, TMP, (MeO)3PO
CAS#: 512-56-1
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 300C

Plasma CoOx

Hardware used: Custom Remote Inductively Coupled Plasma
cobaltacene, bis(cyclopentadienyl)cobalt, Cp2Co
CAS#: 1277-43-6
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 300C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Refractive Index
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Diagnostic: -

Characteristic: Density
Analysis: RBS, Rutherford Backscattering Spectrometry
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo Scientific K-Alpha

Characteristic: Electrochemical Performance
Analysis: CV, Cyclic Voltammetry
Diagnostic: Ivium CompactStat

Characteristic: Catalysis
Analysis: CV, Cyclic Voltammetry
Diagnostic: Ivium CompactStat

Substrates

Si(100)

Notes

1415