Inductively coupled plasma sources from Plasma ALD, LLC.


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Mihalis N. Tsampas Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mihalis N. Tsampas returned 2 record(s).

NumberTitle
1Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction
2Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation