Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Valerio Di Palma Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Valerio Di Palma returned 3 record(s).

NumberTitle
1Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction
2Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
3Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma