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Shuffling Atomic Layer Deposition Gas Sequences to Modulate Bimetallic Thin Films and Nanoparticle Properties

Type:
Journal
Info:
Chem. Mater. 2022, 34, 6142-6154
Date:
2022-06-15
DOI:
http://dx.doi.org/10.1021/acs.chemmater.2c01304

Author Information

Name Institution
Matthias FilezGhent University
Ji-Yu FengGhent University
Matthias M. MinjauwGhent University
Eduardo SolanoALBA Synchrotron Light Source, NCD-SWEET Beamline
Nithin PoonkottilGhent University
Michiel Van DaeleGhent University
Ranjith K. RamachandranGhent University
Chen LiUniversity of Antwerp
Sara BalsUniversity of Antwerp
Hilde PoelmanGhent University
Christophe DetavernierGhent University
Jolien DendoovenGhent University

Films

Plasma PdRu

Hardware used: Custom Remote Inductively Coupled Plasma
palladium(II) hexafluoroacetylacetonate, Pd(hfac)2
CAS#: 64916-48-9
RuO4, ruthenium tetroxide, Air Liquide ToRuSTM
CAS#: 20427-56-9
O2, Oxygen
CAS#: 7782-44-7
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature = 100C

Film/Plasma Properties

Characteristic: Nucleation
Analysis: GISAXS, Grazing Incidence Small Angle X-ray Scattering
Diagnostic: Synchrotron

Characteristic: Chemical Composition, Impurities
Analysis: XRF, X-Ray Fluorescence
Diagnostic: Synchrotron

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker D8 Discover

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: Bruker D8 Discover

Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo VG-Scientific theta probe

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Quanta 200 FEG

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIWAXS, Grazing Incidence Wide Angle X-ray Scattering
Diagnostic: Synchrotron

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: ELS, EELS, Electron Energy Loss Spectroscopy
Diagnostic: -

Substrates

Si with native oxide
Si3N4

Notes

1740