RuO₄, ruthenium tetroxide, Air Liquide ToRuS^TM, CAS# 20427-56-9

Your search for publications using this chemistry returned 3 record(s).

Number	Title
1	Shuffling Atomic Layer Deposition Gas Sequences to Modulate Bimetallic Thin Films and Nanoparticle Properties
2	Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO₄-precursor and H₂-plasma
3	Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition

RuO4, ruthenium tetroxide, Air Liquide ToRuSTM, CAS# 20427-56-9