Hilde Poelman Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hilde Poelman returned 5 record(s).

Number	Title
1	Plasma enhanced atomic layer deposition of Ga₂O₃ thin films
2	Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
3	Tuning size and coverage of Pd nanoparticles using atomic layer deposition
4	Shuffling Atomic Layer Deposition Gas Sequences to Modulate Bimetallic Thin Films and Nanoparticle Properties
5	Low Temperature Atomic Layer Deposition of Crystalline In₂O₃ Films