Michiel Van Daele Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Michiel Van Daele returned 4 record(s).

Number	Title
1	Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy
2	Tuning size and coverage of Pd nanoparticles using atomic layer deposition
3	Shuffling Atomic Layer Deposition Gas Sequences to Modulate Bimetallic Thin Films and Nanoparticle Properties
4	Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature