Pd Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Pd films returned 8 record(s).

Number	Title
1	Plasma-enhanced atomic layer deposition of palladium on a polymer substrate
2	Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)₂ and H₂ and O₂ Plasmas
3	Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
4	Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition
5	Direct Plating of Cu on Pd Plasma Enhanced Atomic Layer Deposition Coated TaN Barrier
6	Plasma-Assisted Atomic Layer Deposition of Palladium
7	In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
8	Tuning size and coverage of Pd nanoparticles using atomic layer deposition