Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Stephane Clemmen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Stephane Clemmen returned 2 record(s).

NumberTitle
1On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies
2Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature