Erwin (W.M.M.) Kessels Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Erwin (W.M.M.) Kessels returned 133 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N2 Plasma on Planar and 3D Substrate Topographies
2Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition
3'Zero-charge' SiO2/Al2O3 stacks for the simultaneous passivation of n+ and p+ doped silicon surfaces by atomic layer deposition
4Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
5Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers
6Enhancing the Wettability of High Aspect-Ratio Through-Silicon Vias Lined With LPCVD Silicon Nitride or PE-ALD Titanium Nitride for Void-Free Bottom-Up Copper Electroplating
7Atomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N2 Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy
8Mass Spectrometry Study of Li2CO3 Film Growth by Thermal and Plasma-Assisted Atomic Layer Deposition
9Low-Temperature Plasma-Assisted Atomic-Layer-Deposited SnO2 as an Electron Transport Layer in Planar Perovskite Solar Cells
10In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
11Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum
12Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition
13Area-Selective Atomic Layer Deposition of In2O3:H Using a µ-Plasma Printer for Local Area Activation
14Plasma and Thermal ALD of Al2O3 in a Commercial 200mm ALD Reactor
15Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO2
16Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
17Silicon surface passivation by ultrathin Al2O3 films synthesized by thermal and plasma atomic layer deposition
18Effective Surface Passivation of InP Nanowires by Atomic-Layer-Deposited Al2O3 with POx Interlayer
19Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
20Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers
21Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
22Plasma-assisted atomic layer deposition of TiN/Al2O3 stacks for metal-oxide-semiconductor capacitor applications
23Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
24Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
25Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma
26Dielectric Properties of Thermal and Plasma-Assisted Atomic Layer Deposited Al2O3 Thin Films
27Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma
28Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
29Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers
30Metal-oxide-based hole-selective tunneling contacts for crystalline silicon solar cells
31Remote Plasma Atomic Layer Deposition of Thin Films of Electrochemically Active LiCoO2
32Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
33Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle
34Redeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time
35Reaction Mechanisms during Atomic Layer Deposition of AlF3 Using Al(CH3)3 and SF6 Plasma
36Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
37Hydrogen induced passivation of Si interfaces by Al2O3 films and SiO2/Al2O3 stacks
38Plasma-Assisted Atomic Layer Deposition of SrTiO3: Stoichiometry and Crystallinity Studied by Spectroscopic Ellipsometry
39Role of field-effect on c-Si surface passivation by ultrathin (2-20 nm) atomic layer deposited Al2O3
40Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
41Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing
42Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
43Synthesis of single-walled carbon nanotubes from atomic-layer-deposited Co3O4 and Co3O4/Fe2O3 catalyst films
44Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
45Probing the Origin and Suppression of Vertically Oriented Nanostructures of 2D WS2 Layers
46Plasma-assisted atomic layer deposition of nickel oxide as hole transport layer for hybrid perovskite solar cells
47Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al2O3
48In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
49Ion energy control during plasma-enhanced atomic layer deposition: enabling materials control and selective processing in the third dimension
50Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
51Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
52Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
53Influence of stoichiometry on the performance of MIM capacitors from plasma-assisted ALD SrxTiyOz films
54Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2
55Comparative study of ALD SiO2 thin films for optical applications
56Atomic layer deposition of molybdenum oxide from (NtBu)2(NMe2)2Mo and O2 plasma
57Low resistivity HfNx grown by plasma-assisted ALD with external rf substrate biasing
58Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
59Plasma-enhanced atomic layer deposition of tungsten oxide thin films using (tBuN)2(Me2N)2W and O2 plasma
60Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
61Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
62Remote Plasma ALD of Platinum and Platinum Oxide Films
63Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3
64Atomic layer deposition of LiF using LiN(SiMe3)2 and SF6 plasma
65Surface passivation of phosphorus-diffused n+-type emitters by plasma-assisted atomic-layer deposited Al2O3
66Plasma-assisted atomic layer deposition of HfNx: Tailoring the film properties by the plasma gas composition
67Opportunities of Atomic Layer Deposition for Perovskite Solar Cells
68In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
69Crystallization Study by Transmission Electron Microscopy of SrTiO3 Thin Films Prepared by Plasma-Assisted ALD
70Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
71Plasma-assisted and thermal atomic layer deposition of electrochemically active Li2CO3
72Evidence for low-energy ions influencing plasma-assisted atomic layer deposition of SiO2: Impact on the growth per cycle and wet etch rate
73Simultaneous scanning tunneling microscopy and synchrotron X-ray measurements in a gas environment
74Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
75Influence of annealing and Al2O3 properties on the hydrogen-induced passivation of the Si/SiO2 interface
76Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
77Room-Temperature Atomic Layer Deposition of Platinum
78Energy-enhanced atomic layer deposition for more process and precursor versatility
79Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
80Atomic insights into the oxygen incorporation in atomic layer deposited conductive nitrides and its mitigation by energetic ions
81Oxygen Recombination Probability Data for Plasma-Assisted Atomic Layer Deposition of SiO2 and TiO2
82Excellent Si surface passivation by low temperature SiO2 using an ultrathin Al2O3 capping film
83Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices
84Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film
85Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
86Optical properties of Y2O3 thin films doped with spatially controlled Er3+ by atomic layer deposition
87Stability of Al2O3 and Al2O3/a-Six:H stacks for surface passivation of crystalline silicon
88Controlling transition metal atomic ordering in two-dimensional Mo1-xWxS2 alloys
89Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
90Anti-stiction coating for mechanically tunable photonic crystal devices
91Encapsulation method for atom probe tomography analysis of nanoparticles
92Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD
93Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction
94Atomic Layer Deposition of Aluminum Phosphate Using AlMe3, PO(OMe)3, and O2 Plasma: Film Growth and Surface Reactions
95Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
96Edge-Site Nanoengineering of WS2 by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution
97Flexible Perovskite Photovoltaic Modules and Solar Cells Based on Atomic Layer Deposited Compact Layers and UV-Irradiated TiO2 Scaffolds on Plastic Substrates
98Uniform Atomic Layer Deposition of Al2O3 on Graphene by Reversible Hydrogen Plasma Functionalization
99Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties
100Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
101Infrared and optical emission spectroscopy study of atmospheric pressure plasma-enhanced spatial ALD of Al2O3
102Surface chemistry of plasma-assisted atomic layer deposition of Al2O3 studied by infrared spectroscopy
103Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor
104Large area, patterned growth of 2D MoS2 and lateral MoS2-WS2 heterostructures for nano- and opto-electronic applications
105Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure
106Temperature study of atmospheric-pressure plasma-enhanced spatial ALD of Al2O3 using infrared and optical emission spectroscopy
107Atmospheric-Pressure Plasma-Enhanced Spatial ALD of SiO2 Studied by Gas-Phase Infrared and Optical Emission Spectroscopy
108Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride
109Cathode encapsulation of organic light emitting diodes by atomic layer deposited Al2O3 films and Al2O3/a-SiNx:H stacks
110Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection
111On the Contact Optimization of ALD-Based MoS2 FETs: Correlation of Processing Conditions and Interface Chemistry with Device Electrical Performance
112Synergy Between Plasma-Assisted ALD and Roll-to-Roll Atmospheric Pressure PE-CVD Processing of Moisture Barrier Films on Polymers
113Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films
114Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
115Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma
116Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
117Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells
118Low-temperature atomic layer deposition of MoOx for silicon heterojunction solar cells
119The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
120Atomic layer deposition of HfO2 using HfCp(NMe2)3 and O2 plasma
121Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3
122Plasma-enhanced and thermal atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide, [Al(CH3)2(μ-OiPr)]2, as an alternative aluminum precursor
123Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
124Co3O4 as Anode Material for Thin Film µBatteries prepared by Remote Plasma Atomic Layer Deposition
125Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition
126Thickness and Morphology Dependent Electrical Properties of ALD-Synthesized MoS2 FETs
127Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma
128Influence of the Deposition Temperature on the c-Si Surface Passivation by Al2O3 Films Synthesized by ALD and PECVD
129Atomic Layer Deposition of Cobalt Using H2-, N2-, and NH3-Based Plasmas: On the Role of the Co-reactant
130Innovative remote plasma source for atomic layer deposition for GaN devices
131Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
132Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO2, TiO2, Al2O3, and HfO2
133Atomic Layer Deposition of LiCoO2 Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries