Erwin (W.M.M.) Kessels Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Erwin (W.M.M.) Kessels returned 119 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1'Zero-charge' SiO2/Al2O3 stacks for the simultaneous passivation of n+ and p+ doped silicon surfaces by atomic layer deposition
2Anti-stiction coating for mechanically tunable photonic crystal devices
3Area-Selective Atomic Layer Deposition of In2O3:H Using a µ-Plasma Printer for Local Area Activation
4Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
5Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle
6Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers
7Atomic insights into the oxygen incorporation in atomic layer deposited conductive nitrides and its mitigation by energetic ions
8Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
9Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma
10Atomic Layer Deposition of Aluminum Phosphate Using AlMe3, PO(OMe)3, and O2 Plasma: Film Growth and Surface Reactions
11Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma
12Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction
13Atomic Layer Deposition of Cobalt Using H2-, N2-, and NH3-Based Plasmas: On the Role of the Co-reactant
14Atomic layer deposition of HfO2 using HfCp(NMe2)3 and O2 plasma
15Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
16Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
17Atomic Layer Deposition of LiCoO2 Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries
18Atomic layer deposition of LiF using LiN(SiMe3)2 and SF6 plasma
19Atomic layer deposition of molybdenum oxide from (NtBu)2(NMe2)2Mo and O2 plasma
20Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
21Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
22Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma
23Atomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N2 Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy
24Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N2 Plasma on Planar and 3D Substrate Topographies
25Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum
26Cathode encapsulation of organic light emitting diodes by atomic layer deposited Al2O3 films and Al2O3/a-SiNx:H stacks
27Co3O4 as Anode Material for Thin Film µBatteries prepared by Remote Plasma Atomic Layer Deposition
28Comparative study of ALD SiO2 thin films for optical applications
29Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films
30Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing
31Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
32Crystallization Study by Transmission Electron Microscopy of SrTiO3 Thin Films Prepared by Plasma-Assisted ALD
33Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
34Dielectric Properties of Thermal and Plasma-Assisted Atomic Layer Deposited Al2O3 Thin Films
35Edge-Site Nanoengineering of WS2 by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution
36Effective Surface Passivation of InP Nanowires by Atomic-Layer-Deposited Al2O3 with POx Interlayer
37Encapsulation method for atom probe tomography analysis of nanoparticles
38Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
39Energy-enhanced atomic layer deposition for more process and precursor versatility
40Enhancing the Wettability of High Aspect-Ratio Through-Silicon Vias Lined With LPCVD Silicon Nitride or PE-ALD Titanium Nitride for Void-Free Bottom-Up Copper Electroplating
41Excellent Si surface passivation by low temperature SiO2 using an ultrathin Al2O3 capping film
42Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO2, TiO2, Al2O3, and HfO2
43Flexible Perovskite Photovoltaic Modules and Solar Cells Based on Atomic Layer Deposited Compact Layers and UV-Irradiated TiO2 Scaffolds on Plastic Substrates
44Hydrogen induced passivation of Si interfaces by Al2O3 films and SiO2/Al2O3 stacks
45Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices
46Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2
47In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
48In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
49In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
50Influence of annealing and Al2O3 properties on the hydrogen-induced passivation of the Si/SiO2 interface
51Influence of stoichiometry on the performance of MIM capacitors from plasma-assisted ALD SrxTiyOz films
52Influence of the Deposition Temperature on the c-Si Surface Passivation by Al2O3 Films Synthesized by ALD and PECVD
53Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3
54Infrared and optical emission spectroscopy study of atmospheric pressure plasma-enhanced spatial ALD of Al2O3
55Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
56Low resistivity HfNx grown by plasma-assisted ALD with external rf substrate biasing
57Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
58Low-temperature atomic layer deposition of MoOx for silicon heterojunction solar cells
59Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
60Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers
61Low-Temperature Plasma-Assisted Atomic-Layer-Deposited SnO2 as an Electron Transport Layer in Planar Perovskite Solar Cells
62Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
63Mass Spectrometry Study of Li2CO3 Film Growth by Thermal and Plasma-Assisted Atomic Layer Deposition
64Metal-oxide-based hole-selective tunneling contacts for crystalline silicon solar cells
65Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
66Opportunities of Atomic Layer Deposition for Perovskite Solar Cells
67Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
68Optical properties of Y2O3 thin films doped with spatially controlled Er3+ by atomic layer deposition
69Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor
70Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties
71Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure
72Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
73Plasma-assisted and thermal atomic layer deposition of electrochemically active Li2CO3
74Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers
75Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
76Plasma-assisted atomic layer deposition of HfNx: Tailoring the film properties by the plasma gas composition
77Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO2
78Plasma-assisted atomic layer deposition of nickel oxide as hole transport layer for hybrid perovskite solar cells
79Plasma-Assisted Atomic Layer Deposition of SrTiO3: Stoichiometry and Crystallinity Studied by Spectroscopic Ellipsometry
80Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
81Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
82Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
83Plasma-assisted atomic layer deposition of TiN/Al2O3 stacks for metal-oxide-semiconductor capacitor applications
84Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma
85Plasma-enhanced and thermal atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide, [Al(CH3)2(μ-OiPr)]2, as an alternative aluminum precursor
86Plasma-enhanced atomic layer deposition of tungsten oxide thin films using (tBuN)2(Me2N)2W and O2 plasma
87Probing the Origin and Suppression of Vertically Oriented Nanostructures of 2D WS2 Layers
88Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al2O3
89Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
90Redeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time
91Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
92Remote Plasma ALD of Platinum and Platinum Oxide Films
93Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
94Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film
95Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
96Remote Plasma Atomic Layer Deposition of Thin Films of Electrochemically Active LiCoO2
97Role of field-effect on c-Si surface passivation by ultrathin (2-20 nm) atomic layer deposited Al2O3
98Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride
99Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD
100Room-Temperature Atomic Layer Deposition of Platinum
101Silicon surface passivation by ultrathin Al2O3 films synthesized by thermal and plasma atomic layer deposition
102Simultaneous scanning tunneling microscopy and synchrotron X-ray measurements in a gas environment
103Stability of Al2O3 and Al2O3/a-Six:H stacks for surface passivation of crystalline silicon
104Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells
105Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition
106Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
107Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
108Surface chemistry of plasma-assisted atomic layer deposition of Al2O3 studied by infrared spectroscopy
109Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
110Surface passivation of phosphorus-diffused n+-type emitters by plasma-assisted atomic-layer deposited Al2O3
111Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
112Synergy Between Plasma-Assisted ALD and Roll-to-Roll Atmospheric Pressure PE-CVD Processing of Moisture Barrier Films on Polymers
113Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition
114Synthesis of single-walled carbon nanotubes from atomic-layer-deposited Co3O4 and Co3O4/Fe2O3 catalyst films
115The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
116Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
117Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection
118Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3
119Uniform Atomic Layer Deposition of Al2O3 on Graphene by Reversible Hydrogen Plasma Functionalization