Atomic layer deposition of LiF using LiN(SiMe3)2 and SF6 plasma

Type:
Journal
Info:
Phys. Chem. Chem. Phys., 2021, 23, 9304-9314
Date:
2021-03-28
DOI:
http://dx.doi.org/10.1039/D0CP05428C

Author Information

Name Institution
Norah HornsveldEindhoven University of Technology
Erwin (W.M.M.) KesselsEindhoven University of Technology
R. A. SynowickiJ.A. Woollam Co., Inc.
Mariadriana CreatoreEindhoven University of Technology

Films

Plasma LiF

Hardware used: Oxford Instruments FlexAL
LiHMDS, Lithium hexamethyldisilazide, Lithium bis(trimethylsilyl)amide, LiN(SiMe3)2
CAS#: 4039-32-1
Where to buy precursor
SF6, Sulfur Hexafluoride
CAS#: 2551-62-4
Deposition Temperature = 150C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam VUV-SE

Characteristic: Refractive Index
Analysis: Ellipsometry
Diagnostic: J.A. Woollam VUV-SE

Characteristic: Extinction Coefficient
Analysis: Ellipsometry
Diagnostic: J.A. Woollam VUV-SE

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000F

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Zeiss Sigma

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Zeiss Sigma

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo Scientific K-Alpha+

Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: EBS, Elastic Backscattering
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Diagnostic: -

Characteristic: Density
Analysis: RBS, Rutherford Backscattering Spectrometry
Diagnostic: -

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: Philips X'Pert MPD Diffactometer

Characteristic: Gas Phase Species
Analysis: QMS, Quadrupole Mass Spectrometer
Diagnostic: Pfeiffer QMS

Substrates

Si(100)

Notes

1562