Search 1536 plasma ALD publications by:
Search 1536 plasma ALD publications by:
R. A. Synowicki Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by R. A. Synowicki returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
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1 | Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma |
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