R. A. Synowicki Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by R. A. Synowicki returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma |
| 2 | Atomic layer deposition of LiF using LiN(SiMe3)2 and SF6 plasma |