Your search for plasma enhanced atomic layer deposition publications authored by N. Hornsveld returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Mass Spectrometry Study of Li2CO3 Film Growth by Thermal and Plasma-Assisted Atomic Layer Deposition|
|2||Plasma-Assisted ALD of LiPO(N) for Solid State Batteries|
|3||Plasma-assisted and thermal atomic layer deposition of electrochemically active Li2CO3|
© 2014-2020 plasma-ald.com