N. Hornsveld Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by N. Hornsveld returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Mass Spectrometry Study of Li2CO3 Film Growth by Thermal and Plasma-Assisted Atomic Layer Deposition
2Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
3Plasma-assisted and thermal atomic layer deposition of electrochemically active Li2CO3


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