Norah Hornsveld Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Norah Hornsveld returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
2Plasma-assisted and thermal atomic layer deposition of electrochemically active Li2CO3
3Atomic layer deposition of LiF using LiN(SiMe3)2 and SF6 plasma
4Atomic Layer Deposition of Aluminum Phosphate Using AlMe3, PO(OMe)3, and O2 Plasma: Film Growth and Surface Reactions
5Mass Spectrometry Study of Li2CO3 Film Growth by Thermal and Plasma-Assisted Atomic Layer Deposition