Publication Information

Title: Plasma-assisted and thermal atomic layer deposition of electrochemically active Li2CO3

Type: Journal

Info: RSC Adv., 2017, 7, 41359-41368

Date: 2017-08-10

DOI: http://dx.doi.org/10.1039/C7RA07722J

Author Information

Name

Institution

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Ghent University

Eindhoven University of Technology

Films

Deposition Temperature Range = 50-300C

1907-33-1

7732-18-5

124-38-9

Deposition Temperature Range = 50-300C

1907-33-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

J.A. Woollam M-2000U

Refractive Index

Ellipsometry

J.A. Woollam M-2000U

Chemical Composition, Impurities

TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis

-

Chemical Composition, Impurities

EBS, Elastic Backscattering

-

Chemical Composition, Impurities

RBS, Rutherford Backscattering Spectrometry

-

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Thermo Scientific K-Alpha+

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Philips X'Pert MPD Diffactometer

Battery Properties

EIS, Electrochemical Impedance Spectroscopy

Metrohm Autolab PGSTAT302

Substrates

TiN

Keywords

Lithium-ion

Batteries

Plasma vs Thermal Comparison

Notes

Precursor decomposes at 350C according to ref 27.

1030



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