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Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
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  • Surface cleaning
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Plasma-assisted and thermal atomic layer deposition of electrochemically active Li2CO3

Type:
Journal
Info:
RSC Adv., 2017, 7, 41359-41368
Date:
2017-08-10
DOI:
http://dx.doi.org/10.1039/C7RA07722J

Author Information

Name Institution
Norah HornsveldEindhoven University of Technology
B. PutEindhoven University of Technology
Erwin (W.M.M.) KesselsEindhoven University of Technology
Philippe M VereeckenGhent University
Mariadriana CreatoreEindhoven University of Technology

Films

Thermal Li2CO3

Hardware used: Oxford Instruments FlexAL
LiOt-Bu, LiOtBu, LTB, Lithium tert-butoxide, Lithium tertiary butoxide, LiOC4H9
CAS#: 1907-33-1
Where to buy precursor
H2O, Water
CAS#: 7732-18-5
Where to buy precursor
CO2, Carbon Dioxide
CAS#: 124-38-9
Where to buy precursor
Deposition Temperature Range = 50-300C

Plasma Li2CO3

Hardware used: Oxford Instruments FlexAL
LiOt-Bu, LiOtBu, LTB, Lithium tert-butoxide, Lithium tertiary butoxide, LiOC4H9
CAS#: 1907-33-1
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 50-300C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000U

Characteristic: Refractive Index
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000U

Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: EBS, Elastic Backscattering
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo Scientific K-Alpha+

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: Philips X'Pert MPD Diffactometer

Characteristic: Battery Properties
Analysis: EIS, Electrochemical Impedance Spectroscopy
Diagnostic: Metrohm Autolab PGSTAT302

Substrates

TiN

Notes

Precursor decomposes at 350C according to ref 27.
1030