Philippe M Vereecken Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Philippe M Vereecken returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
2Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
3Plasma-assisted and thermal atomic layer deposition of electrochemically active Li2CO3
4Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
5Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
6Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
7Plasma-enhanced atomic layer deposition of zinc phosphate