B. Put Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by B. Put returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Plasma-assisted and thermal atomic layer deposition of electrochemically active Li2CO3
2Plasma-Assisted ALD of LiPO(N) for Solid State Batteries