Introducing Plasma ALD, LLC's first in-house product.

An economical, compact inductively coupled plasma source.

Ideal for:

  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

Contact us for more information.



LiOt-Bu, LiOtBu, LTB, Lithium tert-butoxide, Lithium tertiary butoxide, LiOC4H9, CAS# 1907-33-1

Where to buy

NumberVendorRegionLink
1Strem Chemicals, Inc.πŸ‡ΊπŸ‡ΈLithium t-butoxide, 98+%
2GelestπŸ‡ΊπŸ‡ΈLithium t-Butoxide
3Pegasus ChemicalsπŸ‡¬πŸ‡§Lithium tert-butoxide
4Sigma-Aldrich, Co. LLCπŸ‡ΊπŸ‡ΈLithium tert-butoxide 97%
5EreztechπŸ‡ΊπŸ‡ΈLithium tert-butoxide

www.plasma-ald.com does not endorse any chemical suppliers. These links are provided for the benefit of our users. If a link goes bad, let us know.

If you would like your company's precursor products listed, or your existing listing changed or removed, send me an email.


Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 15 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition and In-situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide
2Atomic Layer Deposition of LiCoO2 Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries
3Mass Spectrometry Study of Li2CO3 Film Growth by Thermal and Plasma-Assisted Atomic Layer Deposition
4Remote Plasma Atomic Layer Deposition of Thin Films of Electrochemically Active LiCoO2
5Plasma enhanced atomic layer deposition of thin film Li1+xMn2-xO4 for realization of all solid-state 3D lithium-ion microbatteries
6Plasma enhanced atomic layer deposition of thin film Li1+xMn2-xO4 for realization of all solid-state 3D lithium-ion microbatteries
7Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes
8Atomic Layer Deposition and In-situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide
9Mass Spectrometry Study of Li2CO3 Film Growth by Thermal and Plasma-Assisted Atomic Layer Deposition
10Atomic Layer Deposition and In-situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide
11Stabilization of Lithium Metal Anodes by Hybrid Artificial Solid Electrolyte Interphase
12Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
13Atomic Layer Deposition of the Solid Electrolyte LiPON
14Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
15Plasma-assisted and thermal atomic layer deposition of electrochemically active Li2CO3