2022 Year in Review

February 2023 Stats

The publication database currently has 1673 entries.

204 Films

279 Precursors

78 Dep Hardware Sets

253 Characteristics

91 Theses

5136 Authors

Use Advanced Search for more complex searches

2021 Year in Review

ALD Links

Recent Database Additions

Characterization of thin Al₂O₃/SiO₂ dielectric stack for CMOS transistors Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution Hierarchical Atomic Layer Deposited V₂O₅ on 3D Printed Nanocarbon Electrodes for High-Performance Aqueous Zinc-Ion Batteries Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO₂) plasma enhanced atomic layer deposition (PEALD) processes

LiOt-Bu, LiOtBu, LTB, Lithium tert-butoxide, Lithium tertiary butoxide, LiOC₄H₉, CAS# 1907-33-1

Where to buy

Number	Vendor	Region	Link
1	Ereztech	🇺🇸	Lithium tert-butoxide
2	Strem Chemicals, Inc.	🇺🇸	Lithium t-butoxide, 98+%
3	EpiValence	🇬🇧	Lithium tert-butoxide
4	Sigma-Aldrich, Co. LLC	🇺🇸	Lithium tert-butoxide 97%
5	Gelest	🇺🇸	Lithium t-Butoxide

www.plasma-ald.com does not endorse any chemical suppliers. These links are provided for the benefit of our users. If a link goes bad, let us know.

If you would like your company's precursor products listed, or your existing listing changed or removed, send me an email.

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 15 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Atomic Layer Deposition of the Solid Electrolyte LiPON
2	Atomic Layer Deposition and In-situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide
3	Atomic Layer Deposition and In-situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide
4	Mass Spectrometry Study of Li₂CO₃ Film Growth by Thermal and Plasma-Assisted Atomic Layer Deposition
5	Plasma-assisted and thermal atomic layer deposition of electrochemically active Li₂CO₃
6	Remote Plasma Atomic Layer Deposition of Thin Films of Electrochemically Active LiCoO₂
7	Atomic Layer Deposition of LiCoO₂ Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries
8	Stabilization of Lithium Metal Anodes by Hybrid Artificial Solid Electrolyte Interphase
9	Plasma enhanced atomic layer deposition of thin film Li_1+xMn_2-xO₄ for realization of all solid-state 3D lithium-ion microbatteries
10	Plasma enhanced atomic layer deposition of thin film Li_1+xMn_2-xO₄ for realization of all solid-state 3D lithium-ion microbatteries
11	Mass Spectrometry Study of Li₂CO₃ Film Growth by Thermal and Plasma-Assisted Atomic Layer Deposition
12	Atomic Layer Deposition and In-situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide
13	Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes
14	Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
15	Plasma-Assisted ALD of LiPO(N) for Solid State Batteries