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Plasma enhanced atomic layer deposition of thin film Li1+xMn2-xO4 for realization of all solid-state 3D lithium-ion microbatteries
Type:
Journal
Info:
Journal of Vacuum Science & Technology A 39, 012408 (2021)
Date:
2020-11-23
Author Information
| Name | Institution |
|---|---|
| Ryan Sheil | University of California - Los Angeles (UCLA) |
| Danielle Butts | University of California - Los Angeles (UCLA) |
| Katherine Jungjohann | Sandia National Laboratories |
| Jinkyoung Yoo | Los Alamos National Laboratory |
| Bruce Dunn | University of California - Los Angeles (UCLA) |
| Jane P. Chang | University of California - Los Angeles (UCLA) |
Films
Plasma MnOx
Thermal Li2O
Other LiMnO
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Compositional Depth Profiling
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Chemical Binding
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Electrochemical Performance
Analysis: CV, Cyclic Voltammetry
Characteristic: Battery Properties
Analysis: Galvanostatic Cycling
Substrates
| Si(001) |
| Pt |
Notes
| 1555 |